2019-10-17
Combined STEM-EDS tomography of nanowire structures
Publication
Publication
Semiconductor Science and Technology , Volume 34 - Issue 11 p. 114002.1- 114002.12
The 3D spatial resolution, the material contrast and the evolution of the noise are analyzed in the reconstructed volume of a combined scanning transmission electron microscopy (HAADF-STEM) and energy dispersive x-ray spectroscopy (EDS) tomography experiment. Standard simultaneous iterative reconstruction technique and HAADF-EDS bimodal tomographic reconstruction are considered for the +/-90° tomography series of a pillar shaped sample embedding a full nanowire device. With a high number of iterations, a spatial resolution for both HAADF and EDS down to 5 nanometer can be reached for this volume. Best material's contrast and minimum noise are obtained for medium number of iterations. Improvement of the signal-to-noise and contrast can be obtained by filtering the EDS data while the spatial resolution is not impacted. A fast and reliable preparation methodology for rectangularly shaped pillar samples for tomography analysis is discussed.
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| , , , , | |
| Thermo Fisher Scientific, Eindhoven, The Netherlands | |
| doi.org/10.1088/1361-6641/ab4840 | |
| Semiconductor Science and Technology | |
| Automated multi-modal tomography for sub-22nm IC nodes | |
| Organisation | Centrum Wiskunde & Informatica, Amsterdam (CWI), The Netherlands |
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Bender, H, Richard, O, Kundu, P, Favia, P, Zhong, Z, Palenstijn, W.J, … Schoenmakers, R. (2019). Combined STEM-EDS tomography of nanowire structures. Semiconductor Science and Technology, 34(11), 114002.1–114002.12. doi:10.1088/1361-6641/ab4840
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